Title:
Fundamental Research on Nanomanufacturing
Author:
Lu, Bingheng. editor.
ISBN:
9789811989759
Edition:
1st ed. 2023.
Physical Description:
XVIII, 131 p. 65 illus., 59 illus. in color. online resource.
Series:
Reports of China's Basic Research,
Contents:
Project Overview -- Research Situation -- Nano/Sub-Nanometer Precision Manufacturing -- Consistent Manufacturing of Macro,Micro and Nano Cross-Scale Structures -- Cross-Scale Integrated Manufacturing of Nanostructures and Devices -- New Methods of Laser Micro-Nanomanufacturing -- Other Nanomanufacturing Principles and Technological Breakthroughs -- Outlook.
Added Author:
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-981-19-8975-9Copies:
Available:*
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