Title:
X-ray metrology in semiconductor manufacturing
Author:
Bowen, D. Keith (David Keith), 1940- author.
ISBN:
9781315222035
Physical Description:
1 online resource (279 pages)
Contents:
chapter 1 Introduction -- chapter 2 Thickness Metrology -- chapter 3 Composition and Phase Metrology -- chapter 4 Strain and Stress Metrology -- chapter 5 Mosaic Metrology -- chapter 6 Interface Roughness Metrology -- chapter 7 Porosity Metrology -- chapter 8 Specular X-ray Reflectivity -- chapter 9 X-ray Diffuse Scattering -- chapter 10 Theory of XRD on Polycrystals -- chapter 11 High-Resolution XRD on Single Crystals -- chapter 12 Diffraction Imaging and Defect Mapping -- chapter 13 Modeling and Analysis -- chapter 14 Instrumentation -- chapter 15 Accuracy and Precision of X-ray Metrology.
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 543511-1001 | TK7874.58 .B69 2006 | Searching... | Searching... |