Title:
Semiconductor industry : wafer fab exhaust management
Author:
Sherer, J. Michael, 1958- author.
ISBN:
9781315221052
9781351828253
Physical Description:
1 online resource (194 pages)
Contents:
chapter 1 Semiconductor and Wafer Manufacturing Facilities -- chapter 2 Exhaust Types and Challenges -- chapter 3 Point-Of-Use Devices and Exhaust- Line Requirements -- chapter 4 Centralized Scrubbers -- chapter 5 Centralized Equipment to Control Volatile Organic Compounds -- chapter 6 Emergency Releases -- chapter 7 Exhaust Management and Air Abatement Equipment Examples.
Electronic Access:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 546494-1001 | TK7871.85 .S5224 2005 | Searching... | Searching... |