Cover image for Fine line lithography
Title:
Fine line lithography
Author:
Newman, Roger.
ISBN:
9780444853516

9780444601285

9781299537200
Publication Information:
Amsterdam ; New York : North-Holland Pub. Co. ; New York : Sole distributor for the USA and Canada, Elsevier North-Holland, 1980.
Physical Description:
1 online resource (vii, 481 pages).
Series:
Materials processing, theory and practices ; v. 1
Series Title:
Materials processing, theory and practices ; v. 1
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