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Title:
LIGA and its applications
Author:
Saile, Volker.
ISBN:
9783527622573
Publication Information:
Weinheim : Wiley-VCH ; [Chichester : John Wiley, distributor], c2009.
Physical Description:
x, 479 p. : ill. ; 25 cm.
Series:
Advanced micro & nanosystems ; 7
Series Title:
Advanced micro & nanosystems ; 7
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Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527622573
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