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Cover image for Handbook of surface and nanometrology
Title:
Handbook of surface and nanometrology
Author:
Whitehouse, D. J. (David J.), author.
ISBN:
9780429145544
Physical Description:
1 online resource (xx, 1,150 pages)
General Note:
This is a revised and expanded edition of the Handbook of surface metrology, published 1994--T.p. verso.
Contents:
chapter 1 Introduction—Surface and Nanometrology -- chapter 2 Characterization -- chapter 3 3Chapter Processing, Operations, and Simulations -- chapter 4 4Chapter Measurement Techniques -- chapter 5 5Chapter Standardization–Traceability–Uncertainty -- chapter 6 6Chapter Surfaces and Manufacture -- chapter 7 7Chapter Surface Geometry and Its Importance in Function -- chapter 8 8Chapter Surface Geometry, Scale of Size Effects, Nanometrology -- chapter 9 General Comments.
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E-Book 545051-1001 TA418.7 .W45 2003
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