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Cover image for Handbook of silicon wafer cleaning technology
Title:
Handbook of silicon wafer cleaning technology
Author:
Reinhardt, Karen A.
ISBN:
9780815517733

9780815515548

9780815517719
Edition:
2nd ed.
Publication Information:
Norwich, NY : William Andrew, c2008.
Physical Description:
1 online resource (xxvi, 718 p.) : ill.
Series:
Materials science & process technology series
Series Title:
Materials science & process technology series
Subject Term:
Silicon-on-insulator technology.
Added Author:
Reinhardt, Karen A.

Kern, Werner, 1925-
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815515548
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