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Cover image for Ceramic thick films for MEMS and microdevices
Title:
Ceramic thick films for MEMS and microdevices
Author:
Dorey, Robert A.
ISBN:
9781437778182

9781437778175
Publication Information:
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2011.
Physical Description:
1 online resource (1 v.)
Series:
Micro and nano technologies series
Series Title:
Micro and nano technologies series
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