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Cover image for Fundamentals of semiconductor manufacturing and process control
Title:
Fundamentals of semiconductor manufacturing and process control
Author:
May, Gary S.
ISBN:
9780471784067

9780471790273

9780471790280

9781615838455
Publication Information:
[Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, ©2006.
Physical Description:
1 online resource (xix, 463 pages) : illustrations
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