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Cover image for High density plasma sources design, physics, and performance
Title:
High density plasma sources design, physics, and performance
Author:
Popov, Oleg A.
ISBN:
9780815513773
Publication Information:
Park Ridge, N.J. : Noyes Publications, c1995.
Physical Description:
1 online resource (xx, 445 p.) : ill.
Series:
Materials science and process technology series
Series Title:
Materials science and process technology series
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