Title:
High density plasma sources design, physics, and performance
Author:
Popov, Oleg A.
ISBN:
9780815513773
Publication Information:
Park Ridge, N.J. : Noyes Publications, c1995.
Physical Description:
1 online resource (xx, 445 p.) : ill.
Series:
Materials science and process technology series
Series Title:
Materials science and process technology series
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815513773Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 252065-1001 | ONLINE | Searching... | Searching... |