Title:
PVD for microelectronics sputter deposition applied to semiconductor manufacturing
Author:
Powell, Ronald A.
ISBN:
9780125330268
Publication Information:
San Diego : Academic Press, c1999.
Physical Description:
1 online resource (xiii, 419 p.) : ill.
Series:
Thin films ; v. 26
Series Title:
Thin films ; v. 26
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780125330268Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 256315-1001 | ONLINE | Searching... | Searching... |