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Cover image for Thin film materials technology sputtering of compound materials
Title:
Thin film materials technology sputtering of compound materials
Author:
Wasa, Kiyotaka.
ISBN:
9780815514831
Publication Information:
Norwich, NY : William Andrew Pub. ; Heidelberg : Springer, c2004.
Physical Description:
1 online resource (xiv, 518 p.) : ill.
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