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Cover image for Ion implantation science and technology
Title:
Ion implantation science and technology
Author:
Ziegler, J. F. (James F.)
ISBN:
9780127806204
Publication Information:
Orlando : Academic Press, 1984.
Physical Description:
1 online resource (xi, 635 p.) : ill.
Subject Term:
Ion implantation.

Aufsatzsammlung.

Ionenimplantation.
Added Author:
Ziegler, J. F. (James F.)
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780127806204
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