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Cover image for Semiconductor strain metrology principles and applications
Title:
Semiconductor strain metrology principles and applications
Author:
Wong, Terence K. S.
ISBN:
9781608053599
Publication Information:
[Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]
Physical Description:
1 online resource (136 p. :) ill.
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