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Cover image for MEMS design and fabrication
Title:
MEMS design and fabrication
Author:
Gad-el-Hak, Mohamed, 1945-
ISBN:
9781420036565
Edition:
2nd ed.
Publication Information:
Boca Raton, FL : CRC/Taylor & Francis, 2006.
Physical Description:
664 p. : ill.
Series:
Mechanical engineering series

The MEMS handbook
Series Title:
Mechanical engineering series

The MEMS handbook
Subject Term:
Microelectromechanical systems -- Design and construction.

Microfabrication.
Added Author:
Gad-el-Hak, Mohamed, 1945-
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