Title:
Plasma electronics applications in microelectronic device fabrication
Author:
Makabe, T. (Toshiaki)
ISBN:
9781420012279
Publication Information:
New York : Taylor & Francis, 2006.
Physical Description:
339 p. : ill.
Series:
Series in plasma physics
Series Title:
Series in plasma physics
Subject Term:
Added Author:
Holds:
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 289365-1001 | ONLINE | Searching... | Searching... |