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Cover image for Handbook of optical dimensional metrology
Title:
Handbook of optical dimensional metrology
Author:
Harding, Kevin G.
ISBN:
9781439854822
Publication Information:
Boca Raton : CRC Press, 2013.
Physical Description:
xiii, 492 p. : ill.
Series:
Series in optics and optoelectronics
Series Title:
Series in optics and optoelectronics
Contents:
pt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods.
Abstract:
"The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques"-- Provided by publisher.
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