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Cover image for RF MEMS theory, design, and technology
Title:
RF MEMS theory, design, and technology
Author:
Rebeiz, Gabriel M.
ISBN:
9780471225287
Publication Information:
Hoboken, N.J. : J. Wiley, 2003.
Physical Description:
xx, 483 p. : ill. ; 26 cm.
Subject Term:
Microelectromechanical systems.

Very high speed integrated circuits.
Electronic Access:
John Wiley http://dx.doi.org/10.1002/0471225282
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