Title:
Reliability of MEMS
Author:
Tsuchiya, Toshiyuki.
ISBN:
9783527622139
9783527622566
Publication Information:
Weinheim : Wiley-VCH, c2008.
Physical Description:
1 online resource (xx, 303 p.) : ill.
Series:
Advanced micro & nanosystems ; v. 6
Series Title:
Advanced micro & nanosystems ; v. 6
Subject Term:
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527622139MyiLibrary, Table of contents http://www.myilibrary.com?id=194693&ref=toc
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0838/2008459617-b.html
Copies:
Available:*
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