Title:
Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
Author:
Hilleringmann, Ulrich. author.
ISBN:
9783658410414
Edition:
1st ed. 2023.
Physical Description:
XI, 264 p. 178 illus., 2 illus. in color. online resource.
Contents:
Wafer fabrication -- Thermal oxidation -- Lithography -- Etching technology -- Doping techniques -- Chemical and Physical Deposition -- Metallization and Contacts.
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-3-658-41041-4Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 527665-1001 | ONLINE | Searching... | Searching... |