Title:
Micro and Nano Fabrication Tools and Processes
Author:
Gatzen, Hans H. author.
ISBN:
9783662443958
Edition:
1st ed. 2015.
Physical Description:
XXVI, 519 p. 357 illus., 54 illus. in color. online resource.
Contents:
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-3-662-44395-8Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 530075-1001 | ONLINE | Searching... | Searching... |