Cover image for Novel Optical Technologies for Nanofabrication
Title:
Novel Optical Technologies for Nanofabrication
Author:
Liu, Qian. author.
ISBN:
9783642403873
Edition:
1st ed. 2014.
Physical Description:
IX, 267 p. 232 illus., 162 illus. in color. online resource.
Series:
Nanostructure Science and Technology,
Contents:
Introduction -- Super-resolution Laser Direct Writing and Its Applications -- Laser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices.
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