part Part I: Fundamentals of Optical Elements and Devices -- chapter 1 Light Sources -- chapter 2 Lenses, Prisms, and Mirrors -- chapter 3 Optoelectronic Sensors -- chapter 4 Optical Devices and Optomechanical Elements* -- part Part II: Fundamentals of Principles and Techniques for Metrology -- chapter 5 Propagation of Light -- chapter 6 Interferometry -- chapter 7 Holography -- chapter 8 Speckle Methods and Applications -- chapter 9 Moire Metrology -- chapter 10 Optical Heterodyne Measurement Method -- chapter 11 Diffraction -- chapter 12 Light Scattering -- chapter 13 Polarization -- chapter 14 Near-Field Optics -- chapter 15 Length and Size -- part Part III: Practical Applications -- chapter 16 Displacement -- chapter 17 Straightness and Alignment -- chapter 18 Flatness -- chapter 19 Surface Profi lometry -- chapter 20 Three-Dimensional Shape Measurement -- chapter 21 Fringe Analysis -- chapter 22 Photogrammetry -- chapter 23 Optical Methods in Solid Mechanics -- chapter 24 Optical Methods in Flow Measurement -- chapter 25 Polarimetry -- chapter 26 Birefringence Measurement -- chapter 27 Ellipsometry -- chapter 28 Optical Thin Film and Coatings -- chapter 29 Film Surface and Thickness Profi lometry -- chapter 30 On-Machine Measurements.