Cover image for Handbook of optical dimensional metrology
Title:
Handbook of optical dimensional metrology
Author:
Harding, Kevin G.
ISBN:
9780429064739
Physical Description:
1 online resource (xiii, 492 pages)
Series:
Series in optics and optoelectronics

Series in optics and optoelectronics (CRC Press)
General Note:
A Taylor & Francis book.
Contents:
pt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods.
Abstract:
The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques-- Provided by publisher.
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E-Book 542598-1001 T50 .H268 2013
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