Title:
Nanofabrication handbook
Author:
Cabrini, Stefano.
ISBN:
9780429193293
Physical Description:
1 online resource (xv, 518 pages)
Contents:
pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
Electronic Access:
Click here to view.Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 543217-1001 | TA418.9 .N35 N2523 2012 | Searching... | Searching... |