Title:
Microengineering, MEMS, and interfacing : a practical guide
Author:
Banks, Danny., author.
ISBN:
9780429118883
Physical Description:
1 online resource
Series:
Mechanical engineering ; 199
Contents:
chapter 1 Photolithography -- chapter 2 Silicon Micromachining -- chapter 3 Nonsilicon Processes -- chapter 4 Mask Design -- chapter 5 Microsensors -- chapter 6 Microactuators -- chapter 7 Micro Total Analysis Systems -- chapter 8 Integrated Optics -- chapter 9 Assembly and Packaging -- chapter 10 Nanotechnology -- part Part III -- chapter 11 Amplifiers and Filtering -- chapter 12 Computer Interfacing.
Subject Term:
Electronic Access:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 544843-1001 | TK7875 .B36 2006 | Searching... | Searching... |