Title:
Handbook of semiconductor interconnection technology
Author:
Schwartz, G. C.
ISBN:
9781420017656
Edition:
Second edition.
Physical Description:
1 online resource (520 pages)
Contents:
chapter 1 Methods/Principles of Deposition and Etching of Thin Films -- chapter 2 Characterization / chapter 3 Semiconductor Contact Technology / chapter 4 Interlevel Dielectrics / chapter 5 Metallization / chapter 6 Chip Integration / chapter 7 Reliability
Electronic Access:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 545976-1001 | TK7874.53 .H36 2006 | Searching... | Searching... |