Skip to:Content
|
Bottom
Cover image for Plasma electronics : applications in microelectronic device fabrication
Title:
Plasma electronics : applications in microelectronic device fabrication
Author:
Makabe, T. (Toshiaki), author.
ISBN:
9781482222104
Edition:
Second edition.
Physical Description:
1 online resource
Contents:
chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.
Subject Term:
Added Author:
Electronic Access:
Click here to view.
Holds:
Copies:

Available:*

Library
Material Type
Item Barcode
Shelf Number
Status
Item Holds
Searching...
E-Book 546210-1001 TA2020 .M35 2015
Searching...

On Order

Go to:Top of Page