chapter 1 Physics of Silicon Nanodevices -- chapter 2 Practical CMOS Scaling -- chapter 3 The Scaling Limit of MOSFETs due to Direct Source-Drain Tunneling -- chapter 4 Quantum Effects in Silicon Nanodevices -- chapter 5 Ballistic Transport in Silicon Nanostructures -- chapter 6 Resonant Tunneling in Si Nanodevices -- chapter 7 Silicon Single-Electron Transistor and Memory -- chapter 8 Silicon Memories Using Quantum and Single-Electron Effects -- chapter 9 SESO Memory Devices -- chapter 10 Few Electron Devices and Memory Circuits -- chapter 11 Single-Electron Logic Devices.