Cover image for Photonic MEMS devices : design, fabrication and control
Title:
Photonic MEMS devices : design, fabrication and control
Author:
Liu, Ai-Qun, author.
ISBN:
9781420045710

9781315219875

9781351827072
Physical Description:
1 online resource (483 pages).
Series:
Optical science and engineering series ; Volume 136

Optical science and engineering (Boca Raton, Fla.)
Contents:
chapter 1 MEMS Optical Switches and Systems / chapter 2 Design of MEMS Optical Switches / chapter 3 MEMS Thermo-Optic Switches / chapter 4 PhC Microresonators Dynamic Modulation Devices / chapter 5 MEMS Variable Optical Attenuators / chapter 6 MEMS Discretely Tunable Lasers / chapter 7 MEMS Continuously Tunable Lasers / chapter 8 MEMS Injection-Locked Lasers / chapter 9 Deep Etching Fabrication Process / chapter 10 Deep Submicron Photonic Bandgap Crystal Fabrication Processes / chapter 11 Control Strategies for Electrostatic MEMS Devices / chapter 12 Control of Optical Devices
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E-Book 547879-1001 TK7875 .L58 2009
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