Title:
Integrated circuit fabrication
Author:
Shubham, Kumar, author.
ISBN:
9781000396447
9781000396409
9781003178583
Edition:
1st.
Physical Description:
1 online resource : illustrations (black and white)
General Note:
1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration.
Added Author:
Electronic Access:
Taylor & Francis https://www.taylorfrancis.com/books/9781003178583OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 580915-1001 | TK7874 | Searching... | Searching... |