Title:
Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems
Author:
Wang, Kaiying, author.
ISBN:
9781040767054
9781003674795
9781040766941
Physical Description:
1 online resource (168 pages) : illustrations (black and white)
Electronic Access:
Taylor & Francis https://www.taylorfrancis.com/books/9781003674795OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 582414-1001 | TK7875 | Searching... | Searching... |