Title:
Handbook of VLSI microlithgraphy : principles, technology and applications
ISBN:
9780815512813
Edition:
Reprint ed.
Publication Information:
Park Ridge, N. J. : Noyes, 1991.
Physical Description:
xii, 649 s.
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | Book | 7.2/12/594162 | TK 7874 H3494 1991 | Searching... | Searching... |