Cover image for Semiconductor microchips and fabrication : a practical guide to theory and manufacturing
Title:
Semiconductor microchips and fabrication : a practical guide to theory and manufacturing
Author:
Lian, Yaguang, author.
ISBN:
9781119867814

9781119867807

9781119867791
Physical Description:
1 online resource (xiv, 306 pages) : illustrations (some color)
Contents:
Front Matter -- Introduction to the Basic Concepts -- Brief Introduction of Theories -- Early Radio Communication -- Basic Knowledge of Electric Circuits (Circuits) -- Further Discussion of Semiconductors and Diodes -- Transistor and Integrated Circuit -- The Development History of Semiconductor Industry -- Semiconductor Photonic Devices -- Semiconductor Light Detection and Photocell -- Manufacture of Silicon Wafer -- Basic Knowledges of Process -- Photolithography (Lithography) -- Dielectric Films Growth -- Introduction of Etching and RIE System -- Dry Etching -- Metal Processes -- Doping Processes -- Process Control Monitor, Packaging, and the Others -- Index
Abstract:
"This practical, yet advanced, book is written from the perspective of an engineer with many years' experience in the design and manufacturing of semiconductor microchips, and describes the process using the principles of physics and chemistry. The author believes that readers need to have a simple and practical book in their toolbox, and many former students have praised his approach as being invaluable to their onward career development. The explanation of the semiconductor manufacturing process, and the equipment needed, is carried out based on the machines that are used in clean rooms the world over, so readers will understand how the equipment works, and how they can use the equipment to achieve their design and manufacturing ambitions. Combining theory with practice, all descriptions are carried out around the actual equipment and processes by way of a highly visual text, with illustrations including equipment pictures, manufacturing process schematics, and structures of semiconductor microchips. Through this book, readers can obtain the fundamental knowledge and skills of semiconductor manufacturing, which will help them to better-understand and use semiconductor technology to improve their product quality or project research."-- Provided by publisher.
Local Note:
John Wiley and Sons
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E-Book 597887-1001 TK7874 .L439 2023
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