This book constitutes the refereed proceedings of the 5th International Workshop on Formal Techniques for Safety-Critical Systems, FTSCS 2016, held in Tokyo, Japan, in November 2016. The 9 revised full papers presented together with an abstract of an invited talk were carefully reviewed and selected from 23 submissions. The papers are organized in topical sections on specification and verification; automotive and railway systems; circuits and cyber-physical systems; parametrized verification.