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Cover image for Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines
Title:
Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines
Author:
Lang, Jeffrey. editor.
ISBN:
9780387777474
Physical Description:
XIV, 454p. 604 illus., 302 illus. in color. online resource.
Series:
MEMS Reference Shelf,
Series Title:
MEMS Reference Shelf, 1936-4407
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E-Book 167519-2001 ONLINE
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