Cover image for Gettering Defects in Semiconductors
Title:
Gettering Defects in Semiconductors
Author:
Perevoschikov, Victor A. author.
ISBN:
9783540294993
Physical Description:
XV, 386 p, 70 illus. online resource.
Series:
Springer Series in Advanced Microelectronics, 19
Series Title:
Springer Series in Advanced Microelectronics, 1437-0387 ; 19
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E-Book 182063-2001 ONLINE
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