Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties

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Title:

Author:

Rebohle, Lars. author.

ISBN:

9783642144479

Physical Description:

XVIII, 174 p. online resource.

Series:

Springer Series in Materials Science, 142

Series Title:

Springer Series in Materials Science, 0933-033X ; 142

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	192657-2001	ONLINE	Searching... Unknown	Searching... Unavailable