Cover image for Optical diagnostics for thin film processing
Title:
Optical diagnostics for thin film processing
Author:
Herman, Irving P.
ISBN:
9780123420701

9780080538082

9781281033024
Publication Information:
San Diego, CA : Academic Press, c1996.
Physical Description:
1 online resource (xxix, 783 p.) : ill.
Subject Term:
Thin films -- Surfaces.

Spectrum analysis -- Industrial applications.
Genre:
Electronic books.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780123420701
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