Cover image for Modeling of film deposition for microelectronic applications
Title:
Modeling of film deposition for microelectronic applications
Author:
Rossnagel, Stephen M.
ISBN:
9780125330220
Publication Information:
San Diego : Academic Press, c1996.
Physical Description:
1 online resource (xiv, 291 p.) : ill.
Series:
Thin films ; v. 22
Series Title:
Thin films ; v. 22
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