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Cover image for Introduction to microelectronic fabrication
Title:
Introduction to microelectronic fabrication
Author:
Jaeger, Richard C.
ISBN:
9780201444940
Edition:
2nd ed.
Publication Information:
Upper Saddle River, N.J. : Prentice Hall, c2002.
Physical Description:
xiv, 316 p. : ill.
Series:
Modular series on solid state devices ; v. 5
Series Title:
Modular series on solid state devices ; v. 5
Subject Term:
Integrated circuits -- Very large scale integration -- Design and construction -- Textbooks.
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 Book 7.2/14/1317 TK7874 J33 2002
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