Cover image for Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Title:
Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Author:
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan)
ISBN:
9783038134817
Conference Author:
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan)
Publication Information:
Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Physical Description:
1 online resource (xii, 282 p. :) ill.
Series:
Key engineering materials, v. 459
Series Title:
Key engineering materials, 1013-9826 ; v. 459
Subject Term:
Silicon -- Congresses.

Nanostructures -- Congresses.

Microelectronics -- Congresses.
Added Author:
Hanaizumi, Osamu.

Unno, Masafumi.
Added Corporate Author:
Gunma Daigaku. International Education and Research Center for Silicon Science.

Gunma Daigaku. Advanced Technology Research Center.
Added Conference Author:
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryū-shi, Japan)
Electronic Access:
EBSCOhost http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=553111
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