Cover image for Microlithography science and technology
Title:
Microlithography science and technology
Author:
Suzuki, Kazuaki.
ISBN:
9781420051537
Edition:
2nd ed.
Publication Information:
Boca Raton : CRC Press, c2007.
Physical Description:
848 p. : ill.
Series:
Optical science and engineering ; 126
Series Title:
Optical science and engineering ; 126
Subject Term:
Microlithography -- Industrial applications.

Integrated circuits -- Masks.

Metal oxide semiconductors, Complementary -- Design and construction.

Manufacturing processes.
Added Author:
Suzuki, Kazuaki.

Smith, Bruce W., 1959-
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