Cover image for Plasma electronics applications in microelectronic device fabrication
Title:
Plasma electronics applications in microelectronic device fabrication
Author:
Makabe, T. (Toshiaki)
ISBN:
9781420012279
Publication Information:
New York : Taylor & Francis, 2006.
Physical Description:
339 p. : ill.
Series:
Series in plasma physics
Series Title:
Series in plasma physics
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