Title:
Microsystem technology
Author:
Menz, W. (Wolfgang)
ISBN:
9783527613007
Publication Information:
Weinheim ; New York : Wiley-VCH, c2001.
Physical Description:
xii, 500 p. : ill. ; 25 cm.
Subject Term:
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527613007Copies:
Available:*
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