Cover image for CMOS-MEMS
Title:
CMOS-MEMS
Author:
Brand, Oliver, 1964-
ISBN:
9783527616718

9783527616930
Publication Information:
Weinheim ; [Great Britain] : Wiley-VCH, c2005.
Physical Description:
1 online resource (xiv, 594 p.) : ill.
Series:
Advanced micro & nanosystems ; v. 2
Series Title:
Advanced micro & nanosystems ; v. 2
Subject Term:
Metal oxide semiconductors, Complementary.

Microelectromechanical systems.
Added Author:
Brand, Oliver, 1964-

Fedder, G. K. (Gary K.)
Added Corporate Author:
Wiley InterScience (Online service)
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527616718
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