Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems

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Title:

Author:

Feldman, Martin, editor.

ISBN:

9780857098757

Physical Description:

1 online resource (p. cm.)

Series:

Woodhead Publishing series in electronic and optical materials

Woodhead Publishing series in electronic and optical materials.

General Note:

Previously issued in print: 2013.

Subject Term:

Added Author:

Electronic Access:

Holds:
Copies:

Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	355924-1001	ONLINE(355924.1)	Searching... Unknown	Searching... Unavailable