Title:
Plasma electronics : applications in microelectronic device fabrication
Author:
Makabe, T. (Toshiaki), author.
ISBN:
9781482222104
Edition:
Second edition.
Physical Description:
1 online resource : text file, PDF
Subject Term:
Added Author:
Holds:
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 356943-1001 | ONLINE(356943.1) | Searching... | Searching... |