Title:
Handbook of silicon wafer cleaning technology
Author:
Reinhardt, Karen A., editor.
ISBN:
9780323510851
9780323510844
Edition:
Third edition.
Physical Description:
1 online resource
Series:
Materials science & process technology series
Materials science and process technology series.
Subject Term:
Electronic Access:
ScienceDirect https://www.sciencedirect.com/science/book/9780323510844Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 460022-1001 | ONLINE | Searching... | Searching... |