Title:
Poly-SiGe for MEMS-above-CMOS Sensors
Author:
Gonzalez Ruiz, Pilar. author.
ISBN:
9789400767997
Edition:
1st ed. 2014.
Physical Description:
XVI, 199 p. online resource.
Series:
Springer Series in Advanced Microelectronics, 44
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-94-007-6799-7Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
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Searching... | E-Book | 488174-1001 | ONLINE | Searching... | Searching... |